Study on SIMS Measurements of volatile substances under Low Vacuum Conditions

Presentation information

Oral presentation

07. Beam Technology and Nanofabrication » 7.6 Ion beams

Mon. Mar 17, 2014 9:30 AM - 12:30 PM F4 (F304)

12:00 PM - 12:15 PM

^○Masakazu Kusakari¹, Makiko Fujii¹, Toshio Seki¹, Takaaki Aoki¹, Jiro Matsuo¹ (Kyoto Univ.¹)

Keywords:二次イオン質量分析,低真空