Oral presentation

[17a-F4-1~11] 7.6 Ion beams

Mon. Mar 17, 2014 9:30 AM - 12:30 PM F4 (F304)

△：Young Scientist Oral Presentation Award Applied
▲：English Presentation
▼：Both Award Applied and English Presentation

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9:30 AM - 9:45 AM

[17a-F4-1] Fablicating 10 nm fine pattern by using sputtering and lift-off process

^○Kazuhiro Miwa¹, Takashi Nishimura¹, Tomoyuki Tsuchida¹, Yoshiya Sugiyama¹, Yasuhiko Kojima¹, Takaomi Ito¹, Satoshi Nagai¹ (ELIONIX Inc.¹)

9:45 AM - 10:00 AM

[17a-F4-2] Fabrication process of a micro channel device by an all dry process using focused ion beam

^○（M2）Masanori Adachi¹, Rei Yoshida¹, Junichi Yanagisawa¹ (Univ.of Shiga Prefecture¹)

10:00 AM - 10:15 AM

[17a-F4-3] c-axis normal oriented rare earth GaN thin films grown by ion beam assisted deposition

^○Masashi Suzuki¹, Takahiko Yanagitani¹ (Nagoya Inst. Tech.¹)

10:15 AM - 10:30 AM

[17a-F4-4] Enhancement of Photocatalytic Property of TiO₂ Thin Film by Using Electric Field of Surface Plasmon Due to Ag Nanoparticles in Silica Glass

^○Hiroshi Tsuji¹, Gou Miyagawa¹, Yasuhito Gotoh¹ (Kyoto Univ.¹)

10:30 AM - 10:45 AM

[17a-F4-5] Analysis of Rice Plants in Cesium Spiked Soil

^○（PC）Kenji Ohishi¹, Tetsuo Sakamoto¹, Isamu Kawakami², Takeo Okumura³ (Kogakuin Univ.¹, Atoh Komuten Inc.², Japan Neutron Optics Inc.³)

Break 10:45〜11:00 （10:45 AM - 11:00 AM）

11:00 AM - 11:15 AM

[17a-F4-6] Transmission of 4-MeV C⁴⁺ ions through a curved glass channel

^○Kenji Motohashi^1,3, Yuichi Saitoh², Nobumasa Miyawaki², Shiro Matoba², Yuki Suzuki³ (Toyo Univ.¹, JAEA Takasaki², Toyo Univ.³)

11:15 AM - 11:30 AM

[17a-F4-7] Development of a Vacuum-Electrospray Ionic-liquid Beam Source for SIMS

^○Yukio Fujiwara¹, Naoki Saito¹ (AIST¹)

11:30 AM - 11:45 AM

[17a-F4-8] Depth resolution in TOF-ERDA measurements using He beam

^○Keisuke Yasuda¹, Ryoya Ishigami¹, Yoshinori Nakata¹, Shogo Hibi² (WERC¹, Toyota Central R&D Labs.²)

11:45 AM - 12:00 PM

[17a-F4-9] Improvement of mass resolution in TOF-SIMS with two-step extraction

^○Satoru Nagashima¹, Tetsuo Sakamoto², Takaki Sato³, Masaaki Fujii³ (TOYAMA Co.¹, Kogakuin Univ.², Tokyo Tech.³)

12:00 PM - 12:15 PM

[17a-F4-10] Study on SIMS Measurements of volatile substances under Low Vacuum Conditions

^○Masakazu Kusakari¹, Makiko Fujii¹, Toshio Seki¹, Takaaki Aoki¹, Jiro Matsuo¹ (Kyoto Univ.¹)

12:15 PM - 12:30 PM

[17a-F4-11] Lipid Analysis using Novel SIMS Apparatus for Biological Applications

^○Makiko Fujii¹, Masakazu Kusakari¹, Shunichirou Nakagawa¹, Toshio Seki¹, Takaaki Aoki¹, Jiro Matsuo¹ (Kyoto Univ.¹)

Oral presentation

[17p-F4-1~13] 7.6 Ion beams

Mon. Mar 17, 2014 2:00 PM - 5:30 PM F4 (F304)

△：Young Scientist Oral Presentation Award Applied
▲：English Presentation
▼：Both Award Applied and English Presentation

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Lunch 12:30〜14:00 （12:30 PM - 2:00 PM）

2:00 PM - 2:15 PM

[17p-F4-1] Irradiation Effects on Solid Surface by Ionic Liquid EMIM-N(CN)2 Ion Beams

Takuya Hamaguchi¹, ^○yuki Hoshide¹, Mitsuaki Takeuchi¹, Hiromichi Ryuto¹, Gikan Takaoka¹ (Kyoto Univ.¹)

2:15 PM - 2:30 PM

[17p-F4-2] Surface Modification of Glass Substrate by C_nH_2n+1⁺ Polyatomic Ion Beam

Kyouhei Hayashi¹, ^○Mitsuaki Takeuchi¹, Hiromichi Ryuto¹, Gikan Takaoka¹ (Kyoto Univ.¹)

2:30 PM - 2:45 PM

[17p-F4-3] Estimation of Gas Cluster Formation using Semi-Empirical Model

^○Kazumasa Takahashi¹, Mitsuo Nakajima², Jun Hasegawa², Kazuhiko Horioka², Toru Sasaki¹, Takashi Kikuchi¹, Tsukasa Aso¹, Nob. Harada¹ (Nagaoka Univ. of Tech.¹, Tokyo Tech.²)

2:45 PM - 3:00 PM

[17p-F4-4] Development of neutral cluster velocity measurement technology

^○Toshio Seki¹, Kazuhiro Karahashi², Takaaki Aoki¹, Jiro Matsuo¹ (Kyoto Univ.¹, Osaka Univ.²)

3:00 PM - 3:15 PM

[17p-F4-5] Room-temperature oxidation and planarization of 4H-SiC surface by GCIB

^○Ryo Hinoura¹, Akira Yamaguchi¹, Makoto Kojima¹, Noriaki Toyoda¹, Ken-ichi Hara², Isao Yamada¹ (Graduate school of engineering, Univ. of Hyogo¹, Tokyo Electron Limited²)

3:15 PM - 3:30 PM

[17p-F4-6] Smoothing of Ru thin film with Gas Cluster Ion Beam (I)

^○（M2）Akira Yamaguchi¹, Inaba Kenji³, Ryo Hinoura¹, Noriaki Toyoda¹, Ken-ichi Hara², Nozomu Hatakeyama³, Akira Miyamoto³, Isao Yamada¹ (Grad. School of Engineering, Univ. of Hyogo¹, Tokyo Electron limted², New Industry Creation Hatchery Center, Tohoku Univ.³)

3:30 PM - 3:45 PM

△ [17p-F4-7] Smoothing of Ru thin film with Gas Cluster Ion Beam (II)

^○（M2）Akira Yamaguchi¹, Ryo Hinoura¹, Noriaki Toyoda¹, Ken-ichi Hara², Isao Yamada¹ (Grad. school of engineering, Univ. of Hyogo¹, Tokyo Electron limited²)

Break 15:45〜16:00 （3:45 PM - 4:00 PM）

4:00 PM - 4:15 PM

[17p-F4-8] Irradiation Effects of Acetone Cluster Ion Beam on Photoresist

Yuki Kakumoto¹, ^○Akito Fujita¹, Hiromichi Ryuto¹, Mitsuaki Takeuchi¹, Gikan Takaoka¹ (Kyoto Univ.¹)

4:15 PM - 4:30 PM

[17p-F4-9] Luminescence induced by water cluster ion bombardment on solid surfaces

^○（M2）Akira Sakata¹, Musumeci Francesco^1,2, Hiromichi Ryuto¹, Mitsuaki Takeuchi¹, Gikan Takaoka¹ (Kyoto Univ.¹, Catania Univ.²)

4:30 PM - 4:45 PM

[17p-F4-10] Secondary ion mass spectrometry with water cluster ion beam

^○Shunichiro Nakagawa¹, Toshio Seki^1,2, Takaaki Aoki^1,2, Jiro Matsuo^1,2 (Kyoto Univ.¹, JST-CREST²)

4:45 PM - 5:00 PM

[17p-F4-11] Secondary ion measurement of amino acid molecules with noble gases and molecule cluster ion beams

^○Issei Ihara¹, Kousuke Moritani¹, Masanori Kanai¹, Norio Inui¹, Kozo Mochiji¹ (Univ. of Hyogo¹)

5:00 PM - 5:15 PM

[17p-F4-12] 3D molecular imaging of organic multilayer film by SIMS using gas cluster ion beam.

^○Keisuke Wakamoto¹, Shunichiro Nakagawa¹, Toshio Seki¹, Takaaki Aoki¹, Jiro Matsuo¹ (Kyoto Univ.¹)

5:15 PM - 5:30 PM

[17p-F4-13] Mass imaging of cell level with Ar cluster ion beam

^○Sota Torii¹, Toshio Seki¹, Takaaki Aoki¹, Jiro Matsuo¹ (Kyoto Univ.¹)

Poster presentation

[18a-PA4-1~3] 7.6 Ion beams

Tue. Mar 18, 2014 9:30 AM - 11:30 AM PA4 (アリーナ)

△：Young Scientist Oral Presentation Award Applied
▲：English Presentation
▼：Both Award Applied and English Presentation

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9:30 AM - 11:30 AM

[18a-PA4-1] MD simulation of cluster ion impact on solid target with corner structure

^○Takaaki Aoki¹, Toshio Seki¹, Jiro Matsuo¹ (Kyoto Univ.¹)

9:30 AM - 11:30 AM

[18a-PA4-2] Room-temperature Fabrication of Nanostructures on Transparent and Flexible Polymer Substrates: Ion Energy Dependence

^○Takuto Noda¹, Ghosh Pradip¹, Subramanian Munisamy¹, Ghosh Debasish¹, Zulkifli Zurita¹, Takuma Tsuchiya¹, Kuniyoshi Okabe¹, Shunji Adachi¹, Yousuke Hiraoka¹, Golap Kalita¹, Masaki Tanemura¹ (Nagoya Inst. Technol.¹)

9:30 AM - 11:30 AM

[18a-PA4-3] Cell Attachment on the Surface of Polymer Substrates Modified by Irradiation of Oxygen Ion Beam

Ryo Tsujinaka¹, Miho Nishide¹, ^○Mitsuaki Takeuchi¹, Hiromichi Ryuto¹, Gikan Takaoka¹ (Kyoto Univ.¹)

Sessions

07. Beam Technology and Nanofabrication » 7.6 Ion beams

[17a-F4-1~11] 7.6 Ion beams

[17a-F4-1] Fablicating 10 nm fine pattern by using sputtering and lift-off process

[17a-F4-2] Fabrication process of a micro channel device by an all dry process using focused ion beam

[17a-F4-3] c-axis normal oriented rare earth GaN thin films grown by ion beam assisted deposition

[17a-F4-4] Enhancement of Photocatalytic Property of TiO₂ Thin Film by Using Electric Field of Surface Plasmon Due to Ag Nanoparticles in Silica Glass

[17a-F4-5] Analysis of Rice Plants in Cesium Spiked Soil

[17a-F4-6] Transmission of 4-MeV C⁴⁺ ions through a curved glass channel

[17a-F4-7] Development of a Vacuum-Electrospray Ionic-liquid Beam Source for SIMS

[17a-F4-8] Depth resolution in TOF-ERDA measurements using He beam

[17a-F4-9] Improvement of mass resolution in TOF-SIMS with two-step extraction

[17a-F4-10] Study on SIMS Measurements of volatile substances under Low Vacuum Conditions

[17a-F4-11] Lipid Analysis using Novel SIMS Apparatus for Biological Applications

[17p-F4-1~13] 7.6 Ion beams

[17p-F4-1] Irradiation Effects on Solid Surface by Ionic Liquid EMIM-N(CN)2 Ion Beams

[17p-F4-2] Surface Modification of Glass Substrate by C_nH_2n+1⁺ Polyatomic Ion Beam

[17p-F4-3] Estimation of Gas Cluster Formation using Semi-Empirical Model

[17p-F4-4] Development of neutral cluster velocity measurement technology

[17p-F4-5] Room-temperature oxidation and planarization of 4H-SiC surface by GCIB

[17p-F4-6] Smoothing of Ru thin film with Gas Cluster Ion Beam (I)

△ [17p-F4-7] Smoothing of Ru thin film with Gas Cluster Ion Beam (II)

[17p-F4-8] Irradiation Effects of Acetone Cluster Ion Beam on Photoresist

[17p-F4-9] Luminescence induced by water cluster ion bombardment on solid surfaces

[17p-F4-10] Secondary ion mass spectrometry with water cluster ion beam

[17p-F4-11] Secondary ion measurement of amino acid molecules with noble gases and molecule cluster ion beams

[17p-F4-12] 3D molecular imaging of organic multilayer film by SIMS using gas cluster ion beam.

[17p-F4-13] Mass imaging of cell level with Ar cluster ion beam

[18a-PA4-1~3] 7.6 Ion beams

[18a-PA4-1] MD simulation of cluster ion impact on solid target with corner structure

[18a-PA4-2] Room-temperature Fabrication of Nanostructures on Transparent and Flexible Polymer Substrates: Ion Energy Dependence

[18a-PA4-3] Cell Attachment on the Surface of Polymer Substrates Modified by Irradiation of Oxygen Ion Beam