The 61st JSAP Spring Meeting, 2014

Presentation information

Oral presentation

07. Beam Technology and Nanofabrication » 7.6 Ion beams

[17p-F4-1~13] 7.6 Ion beams

Mon. Mar 17, 2014 2:00 PM - 5:30 PM F4 (F304)

5:00 PM - 5:15 PM

[17p-F4-12] 3D molecular imaging of organic multilayer film by SIMS using gas cluster ion beam.

Keisuke Wakamoto1, Shunichiro Nakagawa1, Toshio Seki1, Takaaki Aoki1, Jiro Matsuo1 (Kyoto Univ.1)

Keywords:質量イメージング,ガスクラスターイオンビーム