The 61st JSAP Spring Meeting, 2014

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Oral presentation

07. Beam Technology and Nanofabrication » 7.6 Ion beams

[17a-F4-1~11] 7.6 Ion beams

Mon. Mar 17, 2014 9:30 AM - 12:30 PM F4 (F304)

9:30 AM - 9:45 AM

[17a-F4-1] Fablicating 10 nm fine pattern by using sputtering and lift-off process

○Kazuhiro Miwa1, Takashi Nishimura1, Tomoyuki Tsuchida1, Yoshiya Sugiyama1, Yasuhiko Kojima1, Takaomi Ito1, Satoshi Nagai1 (ELIONIX Inc.1)

Keywords:lift-off,sputter,微細パターン