[17a-F4-1~11] 7.6 Ion beams

[17a-F4-2] Fabrication process of a micro channel device by an all dry process using focused ion beam

^○（M2）Masanori Adachi¹, Rei Yoshida¹, Junichi Yanagisawa¹ (Univ.of Shiga Prefecture¹)

Keywords:FIB,マイクロ流路デバイス,ドライエッチング