[17p-F4-1~13] 7.6 Ion beams

[17p-F4-6] Smoothing of Ru thin film with Gas Cluster Ion Beam (I)

^○（M2）Akira Yamaguchi¹, Inaba Kenji³, Ryo Hinoura¹, Noriaki Toyoda¹, Ken-ichi Hara², Nozomu Hatakeyama³, Akira Miyamoto³, Isao Yamada¹ (Grad. School of Engineering, Univ. of Hyogo¹, Tokyo Electron limted², New Industry Creation Hatchery Center, Tohoku Univ.³)

Keywords:ガスクラスターイオンビーム,Ru平坦化,分子動力学シミュレーション