The 61st JSAP Spring Meeting, 2014

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Oral presentation

07. Beam Technology and Nanofabrication » 7.6 Ion beams

[17a-F4-1~11] 7.6 Ion beams

Mon. Mar 17, 2014 9:30 AM - 12:30 PM F4 (F304)

11:30 AM - 11:45 AM

[17a-F4-8] Depth resolution in TOF-ERDA measurements using He beam

○Keisuke Yasuda1, Ryoya Ishigami1, Yoshinori Nakata1, Shogo Hibi2 (WERC1, Toyota Central R&D Labs.2)

Keywords:TOF-ERDA,軽元素分析,深さ分解能