[17a-PA4-1~18] 16.3 Bulk, thin-film and other silicon-based solar cells

[17a-PA4-16] Rapid thermal annealing effects on the Si/SiO2 multilayer films deposited by ultrahigh vacuum radio frequency magnetron sputtering

Minoru Kondo¹, ^○Toshio takeuchi¹, Atsushi Kawaharazuka¹, Yoshiji Horikoshi¹ (Waseda University¹)

Keywords:Si/SiO2,quantum well,photoliminescence