[17a-PG2-1~5] 15.5 IV-group crystals and IV-IV-group mixed crystals

[17a-PG2-2] Application of carbon composition grading to compressively strained-Si/Si_1-XC_X/Si(100) heterostructures and its effect on the electrical characteristics

^○Syoichiro Sakai¹, Hiroshi Furukawa¹, Keisuke Arimoto¹, Junzi Yamanaka¹, Kiyokazu Nakagawa¹, Noritaka Usami², Yusuke Hoshi², Kentaro Sawano³ (CCST of Univ. of Yamanashi¹, Nagoya Univ.², ARL Tokyo City Univ.³)

Keywords:歪みSi