[17a-PG2-1~5] 15.5 IV-group crystals and IV-IV-group mixed crystals

[17a-PG2-3] Influence of ion implantation and thermal process on crystallinity of Si1-xCx

Fujiwara Kosuke¹, Sakai Shoichiro¹, Furukawa Hiroshi¹, Inoue Shigenori¹, ^○Arimoto Keisuke¹, Yamanaka Junji¹, Nakagawa Kiyokazu¹, Usami Noritaka², Hoshi Yusuke², Sawano Kentarou³ (CCST Univ. of Yamanashi¹, Nagoya Univ.², ARL Tokyo City Univ.³)

Keywords:Silicon Carbon