[17a-PG2-1~5] 15.5 IV-group crystals and IV-IV-group mixed crystals

[17a-PG2-4] Effect of ion implantation technique on crystalline defects developed during the growths of Si1-xCx/Si(001) structures

Nakagomi Ryo¹, Sakai Shoichiro¹, Fujiwara Kosuke¹, Furukawa Hiroshi¹, ^○Arimoto Keisuke¹, Yamanaka Junji¹, Nakagawa Kiyokazu¹, Usami Noritaka², Hoshi Yusuke², Sawano Kentarou³ (CCST Univ. of Yamanashi¹, Nagoya Univ.², ARL Tokyo City Univ.³)

Keywords:Silicon Carbon