[17a-PG3-1~15] 15.6 IV-group-based compounds

[17a-PG3-1] Evaluation of SiC thin-film generated by solid phase carbonization on Si(111)

^○Tomotaka Hosotani¹, Shota Sanbonsuge², Shun Itou³, Hirokazu Fukidome², Hiroyuki Nagasawa², Maki Suemitsu^2,4 (Tohoku Univ .¹, RIEC², IMR³, JST/CREST⁴)

Keywords:炭化ケイ素