[17a-PG3-1~15] 15.6 IV-group-based compounds

[17a-PG3-11] Gamma Ray Irradiation Dose Dependence of Electrical Characterizations of SiC-MOS Capacitors

^○Kazuya Tanaka¹, Takashi Yokoseki¹, Natsuko Fujita², Takahiro Makino², Shinobu Onoda², Takeshi Ohshima², Yuki Tanaka³, Mikio Kandori³, Toru Yoshie³, Yasuto Hijikata¹ (Saitama Univ.¹, JAEA², Sanken Electric Co., Ltd.³)

Keywords:SiC,ガンマ線,MOS