[17a-PG3-1~15] 15.6 IV-group-based compounds

[17a-PG3-13] Si- and C-face femtosecond laser irradiation onto double-sided polished 6H-SiC.

^○Reina Miyagawa¹, Osamu Eryu¹ (Nagoya Inst. of Tech.¹)

Keywords:フェムト秒レーザー,SiC