The 61st JSAP Spring Meeting, 2014

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Oral presentation

11. Superconductivity » 11.5 Junction, circuit fabrication process and digital applications

[17p-D4-1~13] 11.5 Junction, circuit fabrication process and digital applications

Mon. Mar 17, 2014 2:00 PM - 5:30 PM D4 (D115)

4:30 PM - 4:45 PM

[17p-D4-10] Fabrications of Al superconducting devices grown by ALD

○Hajime Suzuki1,2, Yuichi Harada1, Shirou Saitou1,2, Hiroshi Yamaguchi1 (NTT BRL1, Tokyo University of Science2)

Keywords:原子層成長法