5:15 PM - 5:30 PM
[17p-D5-6] Investigation of Defect Formation Mechanism during Plasma Etching Process for Graphene Fabrication
Keywords:graphene, plasma
Oral presentation
17. Nanocarbon Technology » 17.2 Structural control and process
Mon. Mar 17, 2014 4:00 PM - 6:00 PM D5 (D207)
5:15 PM - 5:30 PM
Keywords:graphene, plasma