The 61st JSAP Spring Meeting, 2014

Presentation information

Print

Oral presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

[17p-E10-1~10] Nanocarbon Technology

Mon. Mar 17, 2014 1:15 PM - 3:45 PM E10 (E204)

1:30 PM - 1:45 PM

[17p-E10-2] Crystal Orientation of beta-Ga2O3 Thin Films Formed on m-Plane Sapphire Substrate

○Shinji Nakagomi1, Satoru Kaneko2, Yoshihiro Kokubun1 (Ishinomaki Senshu Univ.1, Kanagawa Ind. Tech. Center2)

Keywords:酸化ガリウム,結晶配向