[17p-E15-1~15] 14.2 Ultrathin films and quantum nanostructures

△ [17p-E15-7] Fabrication of High Density Sub 10 nm Ge Nanodisks and Its Optical Characteristics Using Bio-template and Neutral Beam Etching

^○Erman Mohd^1,5, Takeru Okada¹, Takuya Fujii^1,6, Hirotaka Endo⁶, Kohei Ito^3,5, Ichiro Yamashita^4,5, Seiji Samukawa^1,2,5 (IFS, Tohoku Univ.¹, WPI-AIMR, Tohoku Univ.², Keio Univ.³, NAIST⁴, JST-CREST⁵, Honda RD Co., Ltd.⁶)

Keywords:neutral beam,quantum dot