[17p-E15-1~15] 14.2 Ultrathin films and quantum nanostructures

[17p-E15-9] The Narrow Line-width Photoluminescence of GaAs Quantum Nanodisk mission by Combination of Bio-template and Neutral Beam Etching

^○Akio Higo¹, Yosuke Tamura^2,7, Takayuki Kiba^3,7, Cedric Thomas^2,7, Yunpeng Wang⁴, Ichiro Yamashita^5,7, Masakazu Sugiyama⁶, Yoshiaki Nakano^4,6, Akihiro Murayama^3,7, Seiji Samukawa^1,2,7 (WPI-AIMR, Tohoku Univ.¹, IFS, Tohoku Univ.², IST, Hokkaido Univ.³, RCAST, the Univ. of Tokyo⁴, NAIST⁵, Dep. of Eng., the Univ. of Tokyo⁶, JST-CREST⁷)

Keywords:光デバイス,III-V族化合物半導体