[17p-E4-1~17] 3.4 Optical measurement

[17p-E4-13] Surface profile measurement by a laser beam scanning interferometer using phase shift method.

^○Ayumu Funakubo¹, Osami Sasaki¹, Samuel Choi¹, Takamasa Suzuki¹ (Niigata Univ.¹)

Keywords:位相シフト法