The 61st JSAP Spring Meeting, 2014

Presentation information

Oral presentation

03. Optics » 3.4 Optical measurement

[17p-E4-1~17] 3.4 Optical measurement

Mon. Mar 17, 2014 1:15 PM - 5:45 PM E4 (E104)

4:45 PM - 5:00 PM

[17p-E4-14] Precision Surface Profile Measurement using White Light Interferometry with Tilting Reference Plane II

Shigeru Matsui1, Yoshisada Ebata1, Kenta Yaegashi1, Akira Fujimoto1 (Hitachi High-Technologies1)

Keywords:干渉計,表面形状,白色干渉