The 61st JSAP Spring Meeting, 2014

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Oral presentation

03. Optics » 3.4 Optical measurement

[17p-E4-1~17] 3.4 Optical measurement

Mon. Mar 17, 2014 1:15 PM - 5:45 PM E4 (E104)

4:30 PM - 4:45 PM

[17p-E4-13] Surface profile measurement by a laser beam scanning interferometer using phase shift method.

○Ayumu Funakubo1, Osami Sasaki1, Samuel Choi1, Takamasa Suzuki1 (Niigata Univ.1)

Keywords:位相シフト法