[17p-E4-1~17] 3.4 Optical measurement

[17p-E4-14] Precision Surface Profile Measurement using White Light Interferometry with Tilting Reference Plane II

^○Shigeru Matsui¹, Yoshisada Ebata¹, Kenta Yaegashi¹, Akira Fujimoto¹ (Hitachi High-Technologies¹)

Keywords:干渉計,表面形状,白色干渉