The 61st JSAP Spring Meeting, 2014

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Oral presentation

03. Optics » 3.4 Optical measurement

[17p-E4-1~17] 3.4 Optical measurement

Mon. Mar 17, 2014 1:15 PM - 5:45 PM E4 (E104)

5:00 PM - 5:15 PM

[17p-E4-15] Film thickness measurement by using THz Time-Domain Spectroscopy

○Motonobu Akagi1, Keiko Kitagishi1 (Otsuka Electronics Co.1)

Keywords:膜厚測定,不透明,テラヘルツ