The 61st JSAP Spring Meeting, 2014

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Oral presentation

03. Optics » 3.4 Optical measurement

[17p-E4-1~17] 3.4 Optical measurement

Mon. Mar 17, 2014 1:15 PM - 5:45 PM E4 (E104)

5:30 PM - 5:45 PM

[17p-E4-17] Optical Measurements of SiC resistivity using by infrared laser

○Akira Maekawa1, Shigeyuki Takagi1, Yasutomo Shiomi1, Tsutomu Kakuno1, Yasuhiro Akiyama1 (Toshiba Corp.1)

Keywords:SiC,赤外レーザ