The 61st JSAP Spring Meeting, 2014

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Oral presentation

15. Crystal Engineering » 15.6 IV-group-based compounds

[17p-E5-1~13] 15.6 IV-group-based compounds

Mon. Mar 17, 2014 1:15 PM - 4:45 PM E5 (E105)

4:30 PM - 4:45 PM

△ [17p-E5-13] Planarization of 6 inch 4H-SiC wafer by using Catalyst-referred etching

○Ai Isohashi1, Yasuhisa Sano1, Takeshi Okamoto1, Tomohisa Kato2, Kazuto Yamauchi1 (Osaka Univ.1, AIST2)

Keywords:SiC,平坦化加工,エッチング