The 61st JSAP Spring Meeting, 2014

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Oral presentation

08. Plasma Electronics » 8.3 Plasma deposition of thin film and surface treatment

[17p-F1-1~16] 8.3 Plasma deposition of thin film and surface treatment

Mon. Mar 17, 2014 2:00 PM - 6:15 PM F1 (F201)

2:00 PM - 2:15 PM

[17p-F1-1] Off-axis RF Magnetron Sputter-Deposition of Al doped ZnO Films

○Yoshinobu Matsuda1, Hironobu Yokoyama1, Takato Nakashima1, Shunsuke Oyamada1, Masanori Shinohara1 (Nagasaki Univ.1)

Keywords:Sputtering,Off-axis,Al添加ZnO