ITO Thin Films Fabricated by Hybrid Facing-target Sputtering

Presentation information

Oral presentation

08. Plasma Electronics » 8.3 Plasma deposition of thin film and surface treatment

Mon. Mar 17, 2014 2:00 PM - 6:15 PM F1 (F201)

2:15 PM - 2:30 PM

^○Shinichi Morohashi¹, Fumihiro Takaki¹, Shunya Arakawa¹, Naoyuki Harada¹, Takuya Murata¹ (Yamaguchi Univ.¹)

Keywords:対向スパッタ,ハイブリッド対向スパッタ