4:30 PM - 4:45 PM
△ [17p-F1-10] Estimation of Electron Collision Cross Sections for TMS vapour
Keywords:TMS,Electron swarm method,Monte Carlo simulation
Presentation information
Oral presentation
08. Plasma Electronics » 8.3 Plasma deposition of thin film and surface treatment
[17p-F1-1~16] 8.3 Plasma deposition of thin film and surface treatment
Mon. Mar 17, 2014 2:00 PM - 6:15 PM F1 (F201)