[17p-F1-1~16] 8.3 Plasma deposition of thin film and surface treatment

△ [17p-F1-9] Fabrication of Diamond Film using Induction Thermal Plasmas Modulated into Triangular-like Waveform and Dependence of Radical Fluxes on Modulation Waveform Shapes

^○Sosuke Horita¹, Yosuke Haruta¹, Miyu Fukuzawa¹, Yasunori Tanaka¹, Yoshihiko Uesugi¹, Tatsuo Ishijima¹ (Kanazawa Univ.¹)

Keywords:熱プラズマ,多結晶ダイヤモンド膜,ラジカル