The 61st JSAP Spring Meeting, 2014

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08. Plasma Electronics » 8.3 Plasma deposition of thin film and surface treatment

[17p-F1-1~16] 8.3 Plasma deposition of thin film and surface treatment

Mon. Mar 17, 2014 2:00 PM - 6:15 PM F1 (F201)

4:30 PM - 4:45 PM

△ [17p-F1-10] Estimation of Electron Collision Cross Sections for TMS vapour

○（M1）Satoru Kawaguchi1, Kohki Satoh1, Hidenori Itoh1 (Muroran I. T.1)

Keywords:TMS,Electron swarm method,Monte Carlo simulation