[17p-F1-1~16] 8.3 Plasma deposition of thin film and surface treatment

[17p-F1-12] Effects of Amplitude Modulation on Cluster Amount in Silane Plasma

^○Susumu Toko¹, Yuji Hashimoto¹, Yoshinori Kanemitu¹, Yoshihiro Torigoe¹, Hyunwoong Seo¹, Kunihiro Kamataki¹, Naho Itagaki¹, Kazunori Koga¹, Masaharu Shiratani¹ (Kyushu Univ.¹)

Keywords:CVD,cluster,AM変調