[17p-F1-1~16] 8.3 Plasma deposition of thin film and surface treatment

[17p-F1-6] Reduction treatment of resistance switching films with hydrazine produced by atmospheric pressure plasma.

^○Masaki Yamada¹, Osamu Sakai¹, Toshihiro Nakamura² (Kyoto Univ.¹, Osaka Electro-Communication Univ.²)

Keywords:プラズマスパッタ,抵抗スイッチング素子,ヒドラジン