[17p-F1-1~16] 8.3 Plasma deposition of thin film and surface treatment

△ [17p-F1-7] Formation of super water-repellent films by chemical vapor deposition with atmospheric pressure plasmas

^○（M2）Kuangda Sun¹, Keigo Takeda¹, Kenji Ishikawa¹, Hiroki Kondo¹, Makoto Sekine¹, Masaru Hori¹ (Nagoya Univ.¹)

Keywords:大気圧プラズマ,撥水膜,化学気相堆積法