[17p-F2-1~17] 8.2 Plasma measurements and diagnostics

[17p-F2-14] Gas Temperature Measurement of ICP Assisted DC Magnetron Discharge by Tunable Diode Laser Absorption Spectroscopy (Ⅲ)

^○Yoshinobu Matsuda¹, Shunsuke Akiba¹, Yuya Sakaguchi¹, Masanori Shinohara¹ (Nagasaki Univ.¹)

Keywords:気体温度,レーザー吸収分光,誘導結合プラズマ