[17p-F2-1~17] 8.2 Plasma measurements and diagnostics

[17p-F2-6] Measurement of Oxygen Ion in Pulsed DC Magnetron Plasma

^○（M1）Yushi Fukuoka¹, Hayato Ogawa¹, Noriharu Takada², Hirotaka Toyoda^1,3 (Nagoya Univ.¹, Technical Center, Nagoya Univ.², PLANT, Nagoya Univ.³)

Keywords:マグネトロンプラズマ,負イオン