[17p-F3-1~16] 8.1 Plasma production and control

[17p-F3-6] Relation between electron energy distribution function in ECR plasma and charge state distribution of multi-charged ion beam extracted from ECRIS

^○Sho Kumakura¹, Daiju Kimura¹, Keisuke Yano¹, Youta Imai¹, Takuya Nishiokada¹, Fuminobu Sato¹, Yushi Kato¹, Toshiyuki Iida¹ (Osaka Univ.¹)

Keywords:ECR plasma,EEDF