[17p-F4-1~13] 7.6 Ion beams

△ [17p-F4-7] Smoothing of Ru thin film with Gas Cluster Ion Beam (II)

^○（M2）Akira Yamaguchi¹, Ryo Hinoura¹, Noriaki Toyoda¹, Ken-ichi Hara², Isao Yamada¹ (Grad. school of engineering, Univ. of Hyogo¹, Tokyo Electron limited²)

Keywords:ガスクラスターイオンビーム,Ru平坦化