The 61st JSAP Spring Meeting, 2014

Presentation information

Print

Oral presentation

07. Beam Technology and Nanofabrication » 7.6 Ion beams

[17p-F4-1~13] 7.6 Ion beams

Mon. Mar 17, 2014 2:00 PM - 5:30 PM F4 (F304)

4:00 PM - 4:15 PM

[17p-F4-8] Irradiation Effects of Acetone Cluster Ion Beam on Photoresist

Yuki Kakumoto1, ○Akito Fujita1, Hiromichi Ryuto1, Mitsuaki Takeuchi1, Gikan Takaoka1 (Kyoto Univ.1)

Keywords:クラスター