[17p-PA2-1~27] 5.0 Optoelectronics (Poster)

▲ [17p-PA2-9] Fabrication of waveguide InGaAs MSM Photodetector on III-V CMOS Photonics Platform

^○（DC）Yongpeng Cheng¹, Yuki Ikku¹, Osamu Ichikawa², Takenori Osada², Masahiko Hata², Mitsuru Takenaka¹, Shinichi Takagi¹ (Univ. Tokyo¹, Sumitomo Chemical Co. Ltd²)

Keywords:Photo-detector,Monolithic-integration,III-V