[17p-PG2-1~23] 6.3 Oxide-based electronics

[17p-PG2-10] Annealing Effect on the Structure of TiO₂ Films Deposited by Glancing Angle Deposition

^○Yoichi Hoshi¹, Terumichi Hirai¹, Naoto Kitahara¹ (Tokyo Polytechnic Univ.¹)

Keywords:斜め入射堆積,光触媒材料,酸化チタン