The 61st JSAP Spring Meeting, 2014

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Poster presentation

06. Thin Films and Surfaces » 6.3 Oxide-based electronics

[17p-PG2-1~23] 6.3 Oxide-based electronics

Mon. Mar 17, 2014 4:00 PM - 6:00 PM PG2 (G棟2階)

4:00 PM - 6:00 PM

[17p-PG2-9] Submicron patterning of Pb(Zr,Ti)O3 thin films by water lift-off process

Takahiro Niwa1, ○Kazuhiro Nakanishi2, Sinya Kumagai3, Takeshi Kawae3, Minoru Sasaki2, Akiharu Morimoto2 (Grad. School of Natural Sci. & Tech. Kanazawa Univ.1, College of Sci. & Eng. Kanazawa Univ.2, Toyota Tech. Inst.3)

Keywords:サブミクロンパターニング,リフトオフ,a-CaO