[17p-PG2-1~23] 6.3 Oxide-based electronics

[17p-PG2-16] Analysis of compositions for NbOx thin film prepared by RF magnetron sputtering method

^○Masashi Yoda¹, Takurou Tsuruoka¹, Go Sajiki¹, Hiroshi Okano¹ (Kagawa-nct¹)

Keywords:ニオブ系酸化物薄膜