The 61st JSAP Spring Meeting, 2014

Presentation information

Print

Poster presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

[17p-PG3-1~30] Nanocarbon Technology

Mon. Mar 17, 2014 4:00 PM - 6:00 PM PG3 (G棟2階)

4:00 PM - 6:00 PM

[17p-PG3-11] Evaluation of Trap States in Amorphous In-Ga-Zn-O by DLTS method Using IGZO/n+Si heterojunction Diodes

○Shuji Kosaka1, Satoshi Yasuno1, Kazushi Hayashi2, Hiroshi Okada1 (KOBELCO Research Institute, Inc.1, Kobe Steel, Ltd.2)

Keywords:DLTS,IGZO