[18a-D6-1~11] 6.2 Carbon-based thin films

[18a-D6-6] Fabrication of a 2-inch size mosaic wafer of single-crystal diamond

^○Hideaki Yamada¹, Akiyoshi Chayahara¹, Yoshiaki Mokuno¹, Yukako Kato¹, Shinichi Shikata¹ (AIST¹)

Keywords:ダイヤモンドウェハ,マイクロ波プラズマ