The 61st JSAP Spring Meeting, 2014

Presentation information

Print

Oral presentation

13. Semiconductors A (Silicon) » 13.2 Insulator technology

[18a-D8-1~12] 13.2 Insulator technology

Tue. Mar 18, 2014 9:00 AM - 12:15 PM D8 (D215)

9:30 AM - 9:45 AM

[18a-D8-3] Silicon oxide film was formed with mixed silicone-oil and ozone gas at low-temperature

○Takuya Ito1, Kensuke Nishioka1 (Miyazaki Univ.1)

Keywords:酸化シリコン,低温,Silicon oxide