[18a-D8-1~12] 13.2 Insulator technology

[18a-D8-9] Influence of the Work Function of Metal Gate Electrodes on UV-Light-Induced Conduction Currents through Silicon Nitride Films

^○（M1）Aran Suzuki¹, Kiyoteru Kobayashi¹ (Tokai Univ.¹)

Keywords:シリコン窒化膜,不揮発性メモリ,仕事関数