Annealing temperature dependence of electrical properties for SiO<sub>2</sub>/GZO bilayer thin film

Presentation information

Oral presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

Tue. Mar 18, 2014 9:00 AM - 11:45 AM E10 (E204)

9:15 AM - 9:30 AM

^○Sota Inoue¹, Hiroki Kikuchi¹, Seiji Ichiyanagi¹, Shuhei Funaki¹, Yasuji Yamada¹ (Shimane Univ.¹)

Keywords:透明導電膜,GZO