[18a-E10-1~10] Nanocarbon Technology

[18a-E10-6] Optimization of deposition power to improve electrical properties of highly transparent conductive Al-doped ZnO films deposited by RF-superimposed DC magnetron sputtering

^○Junichi Nomoto¹, Huaping Song¹, Hisao Makino¹, Seiichi Kishimoto^1,2, Tetsuya Yamamoto¹ (Research Inst. Kochi Univ. Tech.¹, Kochi National College of Tech.²)

Keywords:透明導電膜,ZnO