The 61st JSAP Spring Meeting, 2014

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Oral presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

[18a-E10-1~10] Nanocarbon Technology

Tue. Mar 18, 2014 9:00 AM - 11:45 AM E10 (E204)

11:15 AM - 11:30 AM

[18a-E10-9] Study of transparent conductive InGaZnO thin films

○Masashi Oota1, Noritaka Ishihara1, Yoichi Kurosawa1, Yusuke Nonaka1, Takuya Hirohashi1, Masahiro Takahashi1, Shunpei Yamazaki1, Toshimitsu Obonai2, Yasuharu Hosaka2, Junichi Koezuka2 (Semiconductor Energy Laboratory Co., Ltd.1, Advanced Film Device Inc.2)

Keywords:InGaZnO,透明導電膜